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Handbook of Thin Film Deposition

Handbook of Thin Film Deposition
A Book

by Krishna Seshan,Dominic Schepis

  • Publisher : William Andrew
  • Release : 2018-02-23
  • Pages : 470
  • ISBN : 0128123125
  • Language : En, Es, Fr & De
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Handbook of Thin Film Deposition, Fourth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, materials for memory applications and methods for thin film optical processes. The book is broken up into three sections: scaling, equipment and processing, and applications. In this newly revised edition, the handbook will also explore the limits of thin film applications, most notably as they relate to applications in manufacturing, materials, design and reliability. Offers a practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance, applications and the limitations faced by those processes Covers core processes and applications in the semiconductor industry and new developments within the photovoltaic and optical thin film industries Features a new chapter discussing Gates Dielectrics

Handbook of Thin Film Technology

Handbook of Thin Film Technology
A Book

by Hartmut Frey,Hamid R. Khan

  • Publisher : Springer Science & Business Media
  • Release : 2015-05-06
  • Pages : 380
  • ISBN : 3642054307
  • Language : En, Es, Fr & De
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“Handbook of Thin Film Technology” covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology of thin films.

Handbook of Thin Films, Five-Volume Set

Handbook of Thin Films, Five-Volume Set
A Book

by Hari Singh Nalwa

  • Publisher : Elsevier
  • Release : 2001-11-17
  • Pages : 3451
  • ISBN : 0080533248
  • Language : En, Es, Fr & De
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This five-volume handbook focuses on processing techniques, characterization methods, and physical properties of thin films (thin layers of insulating, conducting, or semiconductor material). The editor has composed five separate, thematic volumes on thin films of metals, semimetals, glasses, ceramics, alloys, organics, diamonds, graphites, porous materials, noncrystalline solids, supramolecules, polymers, copolymers, biopolymers, composites, blends, activated carbons, intermetallics, chalcogenides, dyes, pigments, nanostructured materials, biomaterials, inorganic/polymer composites, organoceramics, metallocenes, disordered systems, liquid crystals, quasicrystals, and layered structures. Thin films is a field of the utmost importance in today's materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, digital camcorders, sensitive broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are but a few examples of miniaturized device technologies that depend the utilization of thin film materials. The Handbook of Thin Films Materials is a comprehensive reference focusing on processing techniques, characterization methods, and physical properties of these thin film materials.

Handbook of Thin-film Deposition Processes and Techniques

Handbook of Thin-film Deposition Processes and Techniques
Principles, Methods, Equipment and Applications

by Krishna Seshan

  • Publisher : Unknown Publisher
  • Release : 2002
  • Pages : 629
  • ISBN : 9786612253195
  • Language : En, Es, Fr & De
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The 2nd edition contains new chapters on contamination and contamination control that describe the basics and the issues. Another new chapter on meteorology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together physical vapor deposition techniques. Two entirely new areas are focused on: chemical mechanical polishing, which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.

Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon

Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon
A Book

by Krishna Seshan

  • Publisher : CRC Press
  • Release : 2002-02-01
  • Pages : 72
  • ISBN : 1482269686
  • Language : En, Es, Fr & De
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The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition tec

Handbook of thin-film deposition processes and techniques

Handbook of thin-film deposition processes and techniques
A Book

by Anonim

  • Publisher : Unknown Publisher
  • Release : 1988
  • Pages : 129
  • ISBN : 9876543210XXX
  • Language : En, Es, Fr & De
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Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon

Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon
A Book

by Krishna Seshan

  • Publisher : CRC Press
  • Release : 2002-02-01
  • Pages : 72
  • ISBN : 9780815514428
  • Language : En, Es, Fr & De
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The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition. This second edition explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of submicron dimensions. The book covers PVD, laser and E-beam assisted deposition, MBE, and ion beam methods to bring together all of the physical vapor deposition techniques. The book also includes coverage of chemical mechanical polishing that helps attain the flatness that is required by modern lithography methods and new materials used for interconnect dielectric materials, specifically organic polyimide materials.

Handbook of Thin Film Materials: Deposition and processing of thin films

Handbook of Thin Film Materials: Deposition and processing of thin films
A Book

by Hari Singh Nalwa

  • Publisher : Unknown Publisher
  • Release : 2002
  • Pages : 129
  • ISBN : 9876543210XXX
  • Language : En, Es, Fr & De
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Handbook of Thin Film Deposition: Processes and Technologies

Handbook of Thin Film Deposition: Processes and Technologies
A Book

by Klaus K. Schuegraf

  • Publisher : Unknown Publisher
  • Release : 2002
  • Pages : 129
  • ISBN : 9876543210XXX
  • Language : En, Es, Fr & De
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A book on deposition for engineers, technicians, and plant personnel in the semiconductor industry. It traces the technology behind the growth in the silicon semiconductor industry and the trend in miniaturization. It explains the growth of automatic tools capable of measuring thickness and spacing of sub-micron dimensions.

Handbook of Thin Film Process Technology

Handbook of Thin Film Process Technology
98/1 Reactive Sputtering

by David A Glocker

  • Publisher : CRC Press
  • Release : 2018-01-18
  • Pages : 90
  • ISBN : 1351089684
  • Language : En, Es, Fr & De
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The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume is a special issue on reactive sputtering which will be of interest to a wide range of industrial and academic researchers in addition to owners of the main Handbook. Some recent developments in the reactive sputtering field are covered, including unbalanced magnetron sputtering and pulsed reactive sputtering. The articles contain a wealth of practical information relating to applications, practice and manufacturing techniques.

Handbook of Thin Film Process Technology

Handbook of Thin Film Process Technology
98/2 Recipes for Optical Materials

by D Glocker

  • Publisher : CRC Press
  • Release : 2018-01-18
  • Pages : 135
  • ISBN : 1351089692
  • Language : En, Es, Fr & De
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The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume presents additional recipe-type information (i.e. important deposition system details and process parameters) for optical materials.

Handbook of Thin Film Process Technology 99/1 Substrate Preparation for Thin Film Deposition

Handbook of Thin Film Process Technology 99/1 Substrate Preparation for Thin Film Deposition
A Book

by D Glocker,S Shah,L Vescan

  • Publisher : CRC Press
  • Release : 2000-01-01
  • Pages : 80
  • ISBN : 9780750305983
  • Language : En, Es, Fr & De
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The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. The main work is regularly updated with new material, and this volume is a special issue on substrate cleaning which will be of interest to industrial and academic researchers in the semiconductor and optics industry in addition to owners of the main Handbook. This supplement includes recipes which give precise instructions for the cleaning of specific substrates, for specific film depositions, or using specific techniques. In addition, general articles evaluate the cleaning procedure, covering the usual contaminants, handling and storage of substrates, chemicals (for instance the importance of the pH of solution, particle deposition), DI quality (level of contamination, water drops), what is removed, drying (e.g. the Marangoni effect), and the surface of the substrate before deposition (composition, morphology, hydrophilic, hydrophobic).

Handbook of Deposition Technologies for Films and Coatings

Handbook of Deposition Technologies for Films and Coatings
Science, Applications and Technology

by Peter M. Martin

  • Publisher : William Andrew
  • Release : 2009-12-01
  • Pages : 936
  • ISBN : 0815520328
  • Language : En, Es, Fr & De
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This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications. * Explains in depth the many recent i

Handbook of Deposition Technologies for Films and Coatings

Handbook of Deposition Technologies for Films and Coatings
Science, Technology, and Applications

by Rointan Framroze Bunshah

  • Publisher : Cambridge University Press
  • Release : 1994
  • Pages : 861
  • ISBN : 9780815513377
  • Language : En, Es, Fr & De
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This second edition, edited by the world-renowned Dr. Rointain Bunshah, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. Considerably more material was added in Plasma Assisted Vapor Deposition processes, as well as Metallurgical Coating Applications.

Handbook of Sputter Deposition Technology

Handbook of Sputter Deposition Technology
Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS

by Kiyotaka Wasa

  • Publisher : William Andrew
  • Release : 2012-12-31
  • Pages : 660
  • ISBN : 1437734847
  • Language : En, Es, Fr & De
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This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere

Handbook of Thin Film Technology

Handbook of Thin Film Technology
A Book

by MAISSEL L.

  • Publisher : McGraw-Hill Companies
  • Release : 1970
  • Pages : 23
  • ISBN : 9876543210XXX
  • Language : En, Es, Fr & De
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Handbook of Thin Films, Five-Volume Set

Handbook of Thin Films, Five-Volume Set
A Book

by Hari Singh Nalwa

  • Publisher : Academic Press
  • Release : 2001-10-29
  • Pages : 3451
  • ISBN : 0125129084
  • Language : En, Es, Fr & De
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This five-volume handbook focuses on processing techniques, characterization methods, and physical properties of thin films (thin layers of insulating, conducting, or semiconductor material). The editor has composed five separate, thematic volumes on thin films of metals, semimetals, glasses, ceramics, alloys, organics, diamonds, graphites, porous materials, noncrystalline solids, supramolecules, polymers, copolymers, biopolymers, composites, blends, activated carbons, intermetallics, chalcogenides, dyes, pigments, nanostructured materials, biomaterials, inorganic/polymer composites, organoceramics, metallocenes, disordered systems, liquid crystals, quasicrystals, and layered structures. Thin films is a field of the utmost importance in today's materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, digital camcorders, sensitive broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are but a few examples of miniaturized device technologies that depend the utilization of thin film materials. The Handbook of Thin Films Materials is a comprehensive reference focusing on processing techniques, characterization methods, and physical properties of these thin film materials.

Thin Film Technology Handbook

Thin Film Technology Handbook
A Book

by Aicha Elshabini,Aicha Elshabini-Riad,Fred D. Barlow,Fred D Barlow,Ishn

  • Publisher : McGraw Hill Professional
  • Release : 1998
  • Pages : 640
  • ISBN : 9780070190252
  • Language : En, Es, Fr & De
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The most comprehensive source available on the preparation, characterization, and emerging applications of thin film. This book features extensive new advances applied in multichip modules (MCMs), and covers the basic principles and applications of thin film deposition techniques for practical use. It provides and develops design guidelines to realize multilayer structures in microcircuits, thus addressing a critical and rapidly growing area.

Handbook of Optical Properties

Handbook of Optical Properties
Thin Films for Optical Coatings

by Rolf E. Hummel,Karl H. Guenther

  • Publisher : CRC Press
  • Release : 1995-02-24
  • Pages : 384
  • ISBN : 9780849324840
  • Language : En, Es, Fr & De
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Thin Films for Optical Coating emphasizes the applications of thin films, deposition of thin films, and thin film characterization. Unlike monographs on this subject, this book presents the views of many expert authors. Individual chapters span a wide arc of topics within this field of study. The book offers an introduction to usual and unusual applications of optical thin films, treating in a more qualitative way general topics such as anticounterfeiting coatings, decorative coatings, light switches, contrast enhancement coatings, multiplexers, optical memories, and more. Contributors review thin film media for optical data storage, UV broadband and narrow-band filters, and optically active thin film coatings. Ion beam sputtering and magnetron sputtering deposition methods are described in detail. Characterization techniques are provided, including Raman spectroscopy and absorption measurements. The book also offers theories on light scattering of thin dielectric films and the electromagnetic properties of nanocermet thin films. This reference incorporates recent research by the individual authors with their views of current developments in their respective fields. Of particular interest to the reader will be an assessment of the historical developments of thin film physics written by one of the fathers of thin film technology, Professor M. Auwärter.

Handbook of Thin Film Materials: Characterization and spectroscopy of thin films

Handbook of Thin Film Materials: Characterization and spectroscopy of thin films
A Book

by Hari Singh Nalwa

  • Publisher : Unknown Publisher
  • Release : 2002
  • Pages : 773
  • ISBN : 9876543210XXX
  • Language : En, Es, Fr & De
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Vol.1: Deposition and processing of thin films; Vol.2: Characterization and spectroscopy of thin films; Vol.3: Ferroelectric and dielectric thin films; Vol.4: Semiconductor and superconductor thin films; Vol.5: Nanomaterials and magnetic thin flims