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Low Temperature Chemical Nanofabrication

Low Temperature Chemical Nanofabrication
Recent Progress, Challenges and Emerging Technologies

by Omer Nur,Magnus Willander

  • Publisher : William Andrew
  • Release : 2020-01-31
  • Pages : 252
  • ISBN : 0128133465
  • Language : En, Es, Fr & De
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Low Temperature Chemical Nanofabrication: Recent Progress, Challenges and Emerging Technologies offers a thorough and theoretical background to nanoscale fabrication phenomena, also covering important practical applications. It covers the conventional top down and the newly emerging bottom up processing methods. The latter has proven to be feasible for obtaining device quality material and can either be performed using high or low temperature processing. Low temperature (˂100 oC), in particular, is becoming increasingly used due to its simplicity and varied applications, with huge benefits for developing new devices and flexible non-conventional substrates. This important resource is ideal for researchers seeking to learn more about the fundamental theories related to nanoscale phenomena and nanofabrication. Provides extensive coverage of nanofabrication techniques, allowing researchers to learn different nanofabrication techniques Explores different applications for low-temperature chemical nanofabrication Cogently explains how low-temperature chemical nanofabrication differs from other nanofabrication techniques, assessing the pros and cons of each

Micro- and Nano-Fabrication by Metal Assisted Chemical Etching

Micro- and Nano-Fabrication by Metal Assisted Chemical Etching
A Book

by Lucia Romano

  • Publisher : MDPI
  • Release : 2021-01-13
  • Pages : 106
  • ISBN : 303943845X
  • Language : En, Es, Fr & De
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Metal-assisted chemical etching (MacEtch) has recently emerged as a new etching technique capable of fabricating high aspect ratio nano- and microstructures in a few semiconductors substrates—Si, Ge, poly-Si, GaAs, and SiC—and using different catalysts—Ag, Au, Pt, Pd, Cu, Ni, and Rh. Several shapes have been demonstrated with a high anisotropy and feature size in the nanoscale—nanoporous films, nanowires, 3D objects, and trenches, which are useful components of photonic devices, microfluidic devices, bio-medical devices, batteries, Vias, MEMS, X-ray optics, etc. With no limitations of large-areas and low-cost processing, MacEtch can open up new opportunities for several applications where high precision nano- and microfabrication is required. This can make semiconductor manufacturing more accessible to researchers in various fields, and accelerate innovation in electronics, bio-medical engineering, energy, and photonics. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on novel methodological developments in MacEtch, and its use for various applications.

Manufacturing Techniques for Microfabrication and Nanotechnology

Manufacturing Techniques for Microfabrication and Nanotechnology
A Book

by Marc J. Madou

  • Publisher : CRC Press
  • Release : 2011-06-13
  • Pages : 670
  • ISBN : 1420055194
  • Language : En, Es, Fr & De
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Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.

The Physics of Micro/Nano-Fabrication

The Physics of Micro/Nano-Fabrication
A Book

by Ivor Brodie,Julius J. Muray

  • Publisher : Springer Science & Business Media
  • Release : 2013-06-29
  • Pages : 622
  • ISBN : 1475767757
  • Language : En, Es, Fr & De
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In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

Micro and Nano Fabrication

Micro and Nano Fabrication
Tools and Processes

by Hans H. Gatzen,Volker Saile,Jürg Leuthold

  • Publisher : Springer
  • Release : 2015-01-02
  • Pages : 519
  • ISBN : 3662443953
  • Language : En, Es, Fr & De
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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

Nanofabrication Using Focused Ion and Electron Beams

Nanofabrication Using Focused Ion and Electron Beams
Principles and Applications

by Ivo Utke,Stanislav Moshkalev,Phillip Russell

  • Publisher : Oxford University Press
  • Release : 2012-03-05
  • Pages : 840
  • ISBN : 0199920990
  • Language : En, Es, Fr & De
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Nanofabrication Using Focused Ion and Electron Beams presents fundamentals of the interaction of focused ion and electron beams (FIB/FEB) with surfaces, as well as numerous applications of these techniques for nanofabrication involving different materials and devices. The book begins by describing the historical evolution of FIB and FEB systems, applied first for micro- and more recently for nanofabrication and prototyping, practical solutions available in the market for different applications, and current trends in development of tools and their integration in a fast growing field of nanofabrication and nanocharacterization. Limitations of the FIB/FEB techniques, especially important when nanoscale resolution is considered, as well as possible ways to overcome the experimental difficulties in creating new nanodevices and improving resolution of processing, are outlined. Chapters include tutorials describing fundamental aspects of the interaction of beams (FIB/FEB) with surfaces, nanostructures and adsorbed molecules; electron and ion beam chemistries; basic theory, design and configuration of equipment; simulations of processes; basic solutions for nanoprototyping. Emerging technologies as processing by cluster beams are also discussed. In addition, the book considers numerous applications of these techniques (milling, etching, deposition) for nanolithography, nanofabrication and characterization, involving different nanostructured materials and devices. Its main focus is on practical details of using focused ion and electron beams with gas assistance (deposition and etching) and without gas assistance (milling/cutting) for fabrication of devices from the fields of nanoelectronics, nanophotonics, nanomagnetics, functionalized scanning probe tips, nanosensors and other types of NEMS (nanoelectromechanical systems). Special attention is given to strategies designed to overcome limitations of the techniques (e.g., due to damaging produced by energetic ions interacting with matter), particularly those involving multi-step processes and multi-layer materials. Through its thorough demonstration of fundamental concepts and its presentation of a wide range of technologies developed for specific applications, this volume is ideal for researches from many different disciplines, as well as engineers and professors in nanotechnology and nanoscience.

Plasma Nanoscience

Plasma Nanoscience
Basic Concepts and Applications of Deterministic Nanofabrication

by Kostya Ostrikov

  • Publisher : John Wiley & Sons
  • Release : 2008-09-22
  • Pages : 563
  • ISBN : 9783527407408
  • Language : En, Es, Fr & De
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Filling the need for a single work specifically addressing how to use plasma for the fabrication of nanoscale structures, this book is the first to cover plasma deposition in sufficient depth. The author has worked with numerous R&D institutions around the world, and here he begins with an introductory overview of plasma processing at micro- and nanoscales, as well as the current problems and challenges, before going on to address surface preparation, generation and diagnostics, transport and the manipulation of nano units.

Nanotechnology Applications for Improvements in Energy Efficiency and Environmental Management

Nanotechnology Applications for Improvements in Energy Efficiency and Environmental Management
A Book

by Shah, M. A.

  • Publisher : IGI Global
  • Release : 2014-07-31
  • Pages : 478
  • ISBN : 1466663057
  • Language : En, Es, Fr & De
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As nanoscale research continues to advance, scientists and engineers are developing new applications for many different disciplines, including environmental remediation and energy optimization. Nanotechnology Applications for Improvements in Energy Efficiency and Environmental Management combines up-to-date research findings and relevant theoretical frameworks on the subject of micro-scale technologies being used to promote environmental sustainability. Highlighting the impacts this technology has on energy production and remediation, this book is an all-inclusive reference source for professionals and researchers interested in understanding the multi-disciplinary applications of nanotechnology and nanoscience.

Plasma-Aided Nanofabrication

Plasma-Aided Nanofabrication
From Plasma Sources to Nanoassembly

by Ken Ostrikov,Shuyan Xu

  • Publisher : John Wiley & Sons
  • Release : 2007-09-24
  • Pages : 315
  • ISBN : 3527611568
  • Language : En, Es, Fr & De
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In this single work to cover the use of plasma as nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of nanofabrication look at reactive plasma as a nanofabrication tool, plasma production and development of plasma sources, as well as such applications as carbon-based nanostructures, low-dimensional quantum confinement structures and hydroxyapatite bioceramics. Written principally for solid state physicists and chemists, materials scientists, and plasma physicists, the book concludes with the outlook for such applications.

Springer Handbook of Nanotechnology

Springer Handbook of Nanotechnology
A Book

by Bharat Bhushan

  • Publisher : Springer
  • Release : 2017-11-05
  • Pages : 1500
  • ISBN : 3662543575
  • Language : En, Es, Fr & De
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This comprehensive handbook has become the definitive reference work in the field of nanoscience and nanotechnology, and this 4th edition incorporates a number of recent new developments. It integrates nanofabrication, nanomaterials, nanodevices, nanomechanics, nanotribology, materials science, and reliability engineering knowledge in just one volume. Furthermore, it discusses various nanostructures; micro/nanofabrication; micro/nanodevices and biomicro/nanodevices, as well as scanning probe microscopy; nanotribology and nanomechanics; molecularly thick films; industrial applications and nanodevice reliability; societal, environmental, health and safety issues; and nanotechnology education. In this new edition, written by an international team of over 140 distinguished experts and put together by an experienced editor with a comprehensive understanding of the field, almost all the chapters are either new or substantially revised and expanded, with new topics of interest added. It is an essential resource for anyone working in the rapidly evolving field of key technology, including mechanical and electrical engineers, materials scientists, physicists, and chemists.

Plasma Nanoengineering and Nanofabrication

Plasma Nanoengineering and Nanofabrication
A Book

by Krasimir Vasilev,Melanie Ramiasa

  • Publisher : MDPI
  • Release : 2018-07-04
  • Pages : 178
  • ISBN : 3038425583
  • Language : En, Es, Fr & De
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This book is a printed edition of the Special Issue "Plasma Nanoengineering and Nanofabrication" that was published in Nanomaterials

Nanofabrication

Nanofabrication
Fundamentals and Applications

by Ampere A. Tseng

  • Publisher : World Scientific
  • Release : 2008
  • Pages : 574
  • ISBN : 9812790896
  • Language : En, Es, Fr & De
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Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy the growing demands of researchers, professionals, and graduate students. Both conventional and non-conventional fabrication technologies are introduced with emphasis on multidisciplinary principles, methodologies, and practical applications. While conventional technologies consider the emerging techniques developed for next generation lithography, non-conventional techniques include scanning probe microscopy lithography, self-assembly, and imprint lithography, as well as techniques specifically developed for making carbon tubes and molecular circuits and devices. Sample Chapter(s). Chapter 1: Atom, Molecule, and Nanocluster Manipulations for Nanostructure Fabrication Using Scanning Probe Microscopy (3,320 KB). Contents: Atomic Force Microscope Lithography (N Kawasegi et al.); Nanowire Assembly and Integration (Z Gu & D H Gracias); Extreme Ultraviolet Lithography (H Kinoshita); Electron Projection Lithography (T Miura et al.); Electron Beam Direct Writing (K Yamazaki); Electron Beam Induced Deposition (K Mitsuishi); Focused Ion Beams and Interaction with Solids (T Ishitani et al.); Nanofabrication of Nanoelectromechanical Systems (NEMS): Emerging Techniques (K L Ekinci & J Brugger); and other papers. Readership: Researchers, professionals, and graduate students in the fields of nanoengineering and nanoscience.

Handbook of Nanostructured Materials and Nanotechnology, Five-Volume Set

Handbook of Nanostructured Materials and Nanotechnology, Five-Volume Set
A Book

by Hari Singh Nalwa

  • Publisher : Academic Press
  • Release : 1999-11
  • Pages : 3461
  • ISBN : 0125137605
  • Language : En, Es, Fr & De
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Nanostructured materials is one of the hottest and fastest growing areas in today's materials science field, along with the related field of solid state physics. Nanostructured materials and their based technologies have opened up exciting new possibilites for future applications in a number of areas including aerospace, automotive, x-ray technology, batteries, sensors, color imaging, printing, computer chips, medical implants, pharmacy, and cosmetics. The ability to change properties on the atomic level promises a revolution in many realms of science and technology. Thus, this book details the high level of activity and significant findings are available for those involved in research and development in the field. It also covers industrial findings and corporate support. This five-volume set summarizes fundamentals of nano-science in a comprehensive way. The contributors enlisted by the editor are at elite institutions worldwide. Key Features * Provides comprehensive coverage of the dominant technology of the 21st century * Written by 127 authors from 16 countries, making this truly international * First and only reference to cover all aspects of nanostructured materials and nanotechnology

Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology

Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology
A Book

by Bijoy Bhattacharyya

  • Publisher : William Andrew
  • Release : 2015-04-10
  • Pages : 296
  • ISBN : 032335288X
  • Language : En, Es, Fr & De
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Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM. Covers the generation of micro features used for advanced engineering of materials for fabrication of MEMS, microsystems and other micro-engineering applications Explores the trend of decreasing size of fabricated devices, reflected in coverage of generation of high-precision nano-features on metal and semiconductors utilizing SPM, STM, and AFM, and nanotechnology aspects of EMM Describes nanofabrication utilizing anodic dissolutions for mass manufacturing by overcoming obstacles utilizing electrochemical microsystem technology (EMST) and electrochemical nanotechnology (ENT)

Nanofabrication Handbook

Nanofabrication Handbook
A Book

by Stefano Cabrini,Satoshi Kawata

  • Publisher : CRC Press
  • Release : 2012-02-24
  • Pages : 546
  • ISBN : 1420090534
  • Language : En, Es, Fr & De
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While many books are dedicated to individual aspects of nanofabrication, there is no single source that defines and explains the total vision of the field. Filling this gap, Nanofabrication Handbook presents a unique collection of new and the most important established approaches to nanofabrication. Contributors from leading research facilities and

Laser-Based Nano Fabrication and Nano Lithography

Laser-Based Nano Fabrication and Nano Lithography
A Book

by Koji Sugioka,Ya Cheng

  • Publisher : MDPI
  • Release : 2018-12-07
  • Pages : 154
  • ISBN : 3038974102
  • Language : En, Es, Fr & De
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This book is a printed edition of the Special Issue "Laser-Based Nano Fabrication and Nano Lithography" that was published in Nanomaterials

Bio-Nanotechnology

Bio-Nanotechnology
A Revolution in Food, Biomedical and Health Sciences

by Manashi Bagchi,Hiroyoshi Moriyama,Fereidoon Shahidi

  • Publisher : John Wiley & Sons
  • Release : 2012-11-26
  • Pages : 824
  • ISBN : 1118451937
  • Language : En, Es, Fr & De
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Bio-nanotechnology is the key functional technology of the 21stcentury. It is a fusion of biology and nanotechnology based on theprinciples and chemical pathways of living organisms, and refers tothe functional applications of biomolecules in nanotechnology. Itencompasses the study, creation, and illumination of theconnections between structural molecular biology, nutrition andnanotechnology, since the development of techniques ofnanotechnology might be guided by studying the structure andfunction of the natural nano-molecules found in living cells.Biology offers a window into the most sophisticated collection offunctional nanostructures that exists. This book is a comprehensive review of the state of the art inbio-nanotechnology with an emphasis on the diverse applications infood and nutrition sciences, biomedicine, agriculture and otherfields. It describes in detail the currently available methods andcontains numerous references to the primary literature, making thisthe perfect “field guide” for scientists who want toexplore the fascinating world of bio-nanotechnology. Safety issuesregarding these new technologies are examined in detail. The book is divided into nine sections – an introductorysection, plus: Nanotechnology in nutrition and medicine Nanotechnology, health and food technology applications Nanotechnology and other versatile applications Nanomaterial manufacturing Applications of microscopy and magnetic resonance innanotechnology Applications in enhancing bioavailability and controllingpathogens Safety, toxicology and regulatory aspects Future directions of bio-nanotechnology The book will be of interest to a diverse range of readers inindustry, research and academia, including biologists, biochemists,food scientists, nutritionists and health professionals.

Green Processes for Nanotechnology

Green Processes for Nanotechnology
From Inorganic to Bioinspired Nanomaterials

by Vladimir A. Basiuk,Elena V. Basiuk

  • Publisher : Springer
  • Release : 2015-03-25
  • Pages : 446
  • ISBN : 3319154613
  • Language : En, Es, Fr & De
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This book provides the state-of-the-art survey of green techniques in preparation of different classes of nanomaterials, with an emphasis on the use of renewable sources. Key topics covered include fabrication of nanomaterials using green techniques as well as their properties and applications, the use of renewable sources to obtain nanomaterials of different classes, from simple metal and metal oxide nanoparticles to complex bioinspired nanomaterials, economic contributions of nanotechnology to green and sustainable growth, and more. This is an ideal book for students, lecturers, researchers and engineers dealing with versatile (mainly chemical, biological, and medical) aspects of nanotechnology, including fabrication of nanomaterials using green techniques and their properties and applications.

Nanofabrication and its Application in Renewable Energy

Nanofabrication and its Application in Renewable Energy
A Book

by Gang Zhang,Navin Manjooran

  • Publisher : Royal Society of Chemistry
  • Release : 2014-03-27
  • Pages : 225
  • ISBN : 1849736405
  • Language : En, Es, Fr & De
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This edited work presents approaches to the fabrication of nanomaterials for energy applications, such as photovoltaics, semiconductors, and thermoelectrics.

Recent Advances in Nanofabrication Techniques and Applications

Recent Advances in Nanofabrication Techniques and Applications
A Book

by Bo Cui

  • Publisher : BoD – Books on Demand
  • Release : 2011-12-02
  • Pages : 628
  • ISBN : 953307602X
  • Language : En, Es, Fr & De
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Nanotechnology has experienced a rapid growth in the past decade, largely owing to the rapid advances in nanofabrication techniques employed to fabricate nano-devices. Nanofabrication can be divided into two categories: "bottom up" approach using chemical synthesis or self assembly, and "top down" approach using nanolithography, thin film deposition and etching techniques. Both topics are covered, though with a focus on the second category. This book contains twenty nine chapters and aims to provide the fundamentals and recent advances of nanofabrication techniques, as well as its device applications. Most chapters focus on in-depth studies of a particular research field, and are thus targeted for researchers, though some chapters focus on the basics of lithographic techniques accessible for upper year undergraduate students. Divided into five parts, this book covers electron beam, focused ion beam, nanoimprint, deep and extreme UV, X-ray, scanning probe, interference, two-photon, and nanosphere lithography.