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Smart Sensors and MEMS

Smart Sensors and MEMS
Proceedings of the NATO Adavanced Study Institute on Smart Sensors and MEMS, Povoa de Varzim, Portugal 8 - 19 September 2003

by Sergey Y. Yurish,Maria T.S.R. Gomes

  • Publisher : Springer Science & Business Media
  • Release : 2007-11-12
  • Pages : 480
  • ISBN : 1402029292
  • Language : En, Es, Fr & De
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The book Smart Sensors and MEMS provides an unique collection of contributions on latest achievements in sensors area and technologies that have made by eleven internationally recognized leading experts from Czech Republic, Germany, Italy, Israel, Portugal, Switzerland, Ukraine and USA during the NATO Advanced Study Institute (ASI) in Povoa de Varzim, Portugal, from 8 to 19 September 2003. The aims of this volume are to disseminate wider and in-depth theoretical and practical knowledge about smart sensors and its applications, to create a clear consciousness about the effectiveness of MEMS technologies, advanced signal processing and conversion methods, to stimulate the theoretical and applied research in these areas, and promote the practical using of these techniques in the industry. With that in mind, a broad range of physical, chemical and biosensors design principles, technologies and applications were included in the book. It is a first attempt to describe in the same book different physical, chemical, biological sensors and MEMS technologies suitable for smart sensors creation. The book presents the state-of-the-art and gives an excellent opportunity to provide a systematic, in-depth treatment of the new and rapidly developing field of smart sensors and MEMS. The volume is an excellent guide for practicing engineers, researchers and students interested in this crucial aspect of actual smart sensor design.

Smart Sensors and MEMS

Smart Sensors and MEMS
Intelligent Sensing Devices and Microsystems for Industrial Applications

by S Nihtianov,A. Luque

  • Publisher : Woodhead Publishing
  • Release : 2018-03-09
  • Pages : 604
  • ISBN : 0081020562
  • Language : En, Es, Fr & De
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Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information. Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS Presents the only book to discuss both smart sensors and MEMS for industrial applications

Smart Sensors and MEMS

Smart Sensors and MEMS
Intelligent Devices and Microsystems for Industrial Applications

by S Nihtianov,A. Luque

  • Publisher : Woodhead Publishing
  • Release : 2014-03-24
  • Pages : 560
  • ISBN : 0857099299
  • Language : En, Es, Fr & De
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Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion and memory functions. Part one outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, and advanced optical incremental sensors (encoders and interferometers), among other topics. The second part of the book describes the industrial applications of smart micro-electro-mechanical systems (MEMS). Some of the topics covered in this section include microfabrication technologies used for creating smart devices for industrial applications, microactuators, dynamic behaviour of smart MEMS in industrial applications, MEMS integrating motion and displacement sensors, MEMS print heads for industrial printing, Photovoltaic and fuel cells in power MEMS for smart energy management, and radio frequency (RF)-MEMS for smart communication microsystems. Smart sensors and MEMS is invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry, and engineers looking for industrial sensing, monitoring and automation solutions. Outlines industrial applications for smart sensors and smart MEMS Covers smart sensors including capacitive, inductive, resistive and magnetic sensors and sensors to detect radiation and measure temperature Covers smart MEMS including power MEMS, radio frequency MEMS, optical MEMS, inertial MEMS, and microreaction chambers

Smart Sensors and MEMS, 2nd Edition

Smart Sensors and MEMS, 2nd Edition
A Book

by S Nihtianov,A. Luque

  • Publisher : Unknown Publisher
  • Release : 2018
  • Pages : 604
  • ISBN : 9876543210XXX
  • Language : En, Es, Fr & De
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Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information. Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS Presents the only book to discuss both smart sensors and MEMS for industrial applications.

Understanding Smart Sensors

Understanding Smart Sensors
A Book

by Randy Frank

  • Publisher : Artech House
  • Release : 2013
  • Pages : 367
  • ISBN : 1608075079
  • Language : En, Es, Fr & De
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Now in its third edition, Understanding Smart Sensors is the most complete, up-to-date, and authoritative summary of the latest applications and developments impacting smart sensors in a single volume. This thoroughly expanded and revised edition of an Artech bestseller contains a wealth of new material, including critical coverage of sensor fusion and energy harvesting, the latest details on wireless technology, and greater emphasis on applications through the book. Utilizing the latest in smart sensor, microelectromechanical systems (MEMS) and microelectronic research and development, Engineers get the technical and practical information they need keep their designs and products on the cutting edge. Providing an extensive variety of information for both technical and non-technical professionals, this easy-to-understand, time-saving book covers current and emergent technologies, as well as their practical implementation. This comprehensive resource also includes an extensive list of smart sensor acronyms and a glossary of key terms.

Smart Mems and Sensor Systems

Smart Mems and Sensor Systems
A Book

by Elena Gaura,Robert M. Newman

  • Publisher : Imperial College Press
  • Release : 2006
  • Pages : 539
  • ISBN : 1860949207
  • Language : En, Es, Fr & De
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In recent years, MEMS have revolutionized the semiconductor industry, with sensors being a particularly buoyant sector. Smart MEMS and Sensor Systems presents readers with the means to understand, evaluate, appreciate and participate in the development of the field, from a unique systems perspective. The combination of MEMS and integrated intelligence has been put forward as a disruptive technology. The full potential of this technology is only evident when it is used to construct very large pervasive sensing systems. The book explores the many different technologies needed to build such systems and integrates knowledge from three different domains: MEMS technology, sensor system electronics and pervasive computing science. Throughout the book a top-down design perspective is taken, be it for the development of a single smart sensor or that of adaptive ad-hoc networks of millions of sensors. For experts in any of the domains named above the book provides the context for their MEMS based design work and an understanding of the role the other domains play. For the generalist (either in engineering or computing) or the technology manager the underpinning knowledge is provided, which can inform specialist decision making. Sample Chapter(s). Chapter 1: Markets and Applications (1,731 KB). Contents: Markets and Applications; Microfabrication Technologies; Sensor Electronics; Sensor Signal Enhancement; Case Study: Control Systems for Capacitive Inertial Sensors; Case Study: Adaptive Optics and Smart VLSI/MEMS Systems; Artificial Intelligence Techniques for Microsensors Identification and Compensation; Smart, Intelligent and Cogent MEMS Based Sensors; Sensor Arrays and Networks; Wireless and Ad Hoc Sensor Networks; Realising the Dream OCo A Case Study. Readership: Graduate students on courses in sensing, instrumentation, VLSI, and MEMS technology; researchers and academics dealing with smart sensor systems; practitioners who need to understand and apply the technology effectively."

Microsensors, MEMS, and Smart Devices

Microsensors, MEMS, and Smart Devices
A Book

by Professor of Electronic Engineering Julian W Gardner,Julian W. Gardner,Vijay K. Varadan,Osama O. Awadelkarim,Osama O.. Awadelkarim

  • Publisher : Wiley-Blackwell
  • Release : 2001
  • Pages : 503
  • ISBN : 9876543210XXX
  • Language : En, Es, Fr & De
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Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle. Providing a complete overview of microsensor technologies, this unique reference addresses vital integration issues for the successful application of microsensors, MEMS and smart devices. Features include: * Review of traditional and emerging fabrication processes including bulk and silicon micromachining, microstereolithography and polymer processing methods. * Focus on the use of IDT (interdigital transducer) microsensors in the development of low energy budget, wireless MEMS or micromachines. * Coverage of the katest applications in smart devices including the electronic nose, tongue and finger, along with smart sensors and strcutures such as smart skin. * An overview of the development of intelligent sensing devices through the use of sensor arrays, parametric compensation of sensor sugnals and ASIC technology. * Comprehensive appendices outlining vital MEMS material properties, relevant web sites and a guide to key institutions active in the field. Microsensors, MEMS and Smart Devices presents readers with the means to understand and evaluate microsystems. Advanced students and researchers in microelectronics, engineers and developers of microsensor systems will find this comprehensive treatment essential reading. Detailed coverage of material properties makes this an important reference work for mechnical engineers, physicists and material scientists working in the field.

Smart Material Systems and MEMS

Smart Material Systems and MEMS
Design and Development Methodologies

by Vijay K. Varadan,K. J. Vinoy,S. Gopalakrishnan

  • Publisher : John Wiley & Sons
  • Release : 2006-11-02
  • Pages : 418
  • ISBN : 0470093625
  • Language : En, Es, Fr & De
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Presenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges faced by engineers working with smart sensors in a variety of applications. Part I deals with the fundamental concepts of a typical smart system and its constituent components. Preliminary fabrication and characterization concepts are introduced before design principles are discussed in detail. Part III presents a comprehensive account of the modeling of smart systems, smart sensors and actuators. Part IV builds upon the fundamental concepts to analyze fabrication techniques for silicon-based MEMS in more detail. Practicing engineers will benefit from the detailed assessment of applications in communications technology, aerospace, biomedical and mechanical engineering. The book provides an essential reference or textbook for graduates following a course in smart sensors, actuators and systems.

Smart Sensors and Systems

Smart Sensors and Systems
A Book

by Youn-Long Lin,Chong-Min Kyung,Hiroto Yasuura,Yongpan Liu

  • Publisher : Springer
  • Release : 2015-07-13
  • Pages : 467
  • ISBN : 3319147110
  • Language : En, Es, Fr & De
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This book describes for readers technology used for effective sensing of our physical world and intelligent processing techniques for sensed information, which are essential to the success of the Internet of Things (IoTs). The authors provide a multidisciplinary view of sensor technology from MEMS, biological, chemical, and electrical domains and showcase smart sensor systems in real applications including smart home, transportation, medical, environmental, agricultural, etc. Unlike earlier books on sensors, this book provides a “global” view on smart sensors covering abstraction levels from device, circuit, systems, and algorithms.

Smart Nitrate Sensor

Smart Nitrate Sensor
Internet of Things Enabled Real-Time Water Quality Monitoring

by Md Eshrat E. Alahi,Subhas Chandra Mukhopadhyay

  • Publisher : Springer
  • Release : 2019-05-09
  • Pages : 132
  • ISBN : 3030200957
  • Language : En, Es, Fr & De
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This book presents the design and development of an Internet of Things (IoT) enabled, smart sensor to detect nitrate contamination in natural water. It considers three different sensors designed, fabricated and configured for nitrate detection: a Graphite/PDMS and Si-based MEMS sensors, and aFR4-based sensor. It also introduces a selective polymer material developed by means of the ion imprinting polymerization technique that was used as a coating on the Si-based MEMS sensor. Further, the book discusses the development of a smart sensing system that can be used to remotely monitor the nitrate concentration in any water. Fully explaining all the techniques used, the book is of interest to engineers, researchers and scientists working in the field of the water-quality measurement.

MEMS Mechanical Sensors

MEMS Mechanical Sensors
A Book

by Stephen Beeby

  • Publisher : Artech House
  • Release : 2004
  • Pages : 269
  • ISBN : 9781580538732
  • Language : En, Es, Fr & De
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Annotation Engineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors.

Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication

Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication
A Book

by P. Rai-Choudhury

  • Publisher : SPIE Press
  • Release : 1997
  • Pages : 692
  • ISBN : 9780819423795
  • Language : En, Es, Fr & De
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Part of a compilation of diverse information into a single, two-volume resource just at the moment when researchers are weighing the alternatives to visible light that will be necessary to etch features smaller than 0.13 microns. Volume Two focuses on the process technology and the device applicatio

MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications

MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications
A Book

by A. R. Jha

  • Publisher : CRC Press
  • Release : 2008-04-08
  • Pages : 432
  • ISBN : 0203881060
  • Language : En, Es, Fr & De
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The integration of microelectromechanical systems (MEMS) and nanotechnology (NT) in sensors and devices significantly reduces their weight, size, power consumption, and production costs. These sensors and devices can then play greater roles in defense operations, wireless communication, the diagnosis and treatment of disease, and many more applications. MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications presents the latest performance parameters and experimental data of state-of-the-art sensors and devices. It describes packaging details, materials and their properties, and fabrication requirements vital for design, development, and testing. Some of the cutting-edge materials covered include quantum dots, nanoparticles, photonic crystals, and carbon nanotubes (CNTs). This comprehensive work encompasses various types of MEMS- and NT-based sensors and devices, such as micropumps, accelerometers, photonic bandgap devices, acoustic sensors, CNT-based transistors, photovoltaic cells, and smart sensors. It also discusses how these sensors and devices are used in a number of applications, including weapons’ health, battlefield monitoring, cancer research, stealth technology, chemical detection, and drug delivery.

Computational Science and Technology

Computational Science and Technology
5th ICCST 2018, Kota Kinabalu, Malaysia, 29-30 August 2018

by Rayner Alfred,Yuto Lim,Ag Asri Ag Ibrahim,Patricia Anthony

  • Publisher : Springer
  • Release : 2018-08-27
  • Pages : 583
  • ISBN : 9811326223
  • Language : En, Es, Fr & De
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This book features the proceedings of the Fifth International Conference on Computational Science and Technology 2018 (ICCST2018), held in Kota Kinabalu, Malaysia, on 29–30 August 2018. Of interest to practitioners and researchers, it presents exciting advances in computational techniques and solutions in this area. It also identifies emerging issues to help shape future research directions and enable industrial users to apply cutting-edge, large-scale and high-performance computational methods.

Smart Sensors, Actuators, and MEMS VI

Smart Sensors, Actuators, and MEMS VI
24-26 April 2013, Grenoble, France

by Ulrich Schmid,José Luis Sánchez-Rojas,Monika Leester-Schaedel

  • Publisher : Unknown Publisher
  • Release : 2013
  • Pages : 329
  • ISBN : 9876543210XXX
  • Language : En, Es, Fr & De
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Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.

Smart Sensors and Sensing Technology

Smart Sensors and Sensing Technology
A Book

by Gourab Sen Gupta

  • Publisher : Springer Science & Business Media
  • Release : 2008-07-01
  • Pages : 411
  • ISBN : 3540795901
  • Language : En, Es, Fr & De
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Technological advancements in recent years have enabled the development of tiny, cheap disposable and self contained battery powered computers, known as sensor nodes or “motes”, which can accept input from an attached sensor, process this input and transmit the results wirelessly to some interested device(s). When a number of these nodes work together, conceivably up to hundreds of thousands, a Wireless Sensor Network (WSN) is formed. Research in the area of wireless sensor networks has become increasingly wid- pread in recent years, partly due to their wide range of potential uses and also partly due to the fact that the technology enabling such networks is now widely available from many di?erent suppliers, such as: Crossbow, MoteIV, Intel and SUN (java based motes). These wireless sensor networks have the potential to allow a level of integration between computers and the physical world that, to date, has been virtually impos- ble. The uses for such networks is almost limitless and include such diverse app- cations as a counter sniper system for urban warfare [1] tracking the path of a forest re [2], determining the structural stability of a building after an earthquake [3], or tracking people or objects inside a building [4], etc.

Smart Sensor Systems

Smart Sensor Systems
Emerging Technologies and Applications

by Gerard Meijer,Kofi Makinwa,Michiel Pertijs

  • Publisher : John Wiley & Sons
  • Release : 2014-04-02
  • Pages : 296
  • ISBN : 1118703170
  • Language : En, Es, Fr & De
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With contributions from an internationally-renowned group ofexperts, this book uses a multidisciplinary approach to reviewrecent developments in the field of smart sensor systems, coveringimportant system and design aspects. It examines topics overthe whole range of sensor technology from the theory andconstraints of basic elements, physics and electronics, up to thelevel of application-orientated issues. Developed as a complementary volume to ‘Smart SensorSystems’ (Wiley 2008), which introduces the basics of smartsensor systems, this volume focuses on emerging sensingtechnologies and applications, including: State-of-the-art techniques for designing smart sensors andsmart sensor systems, including measurement techniques at systemlevel, such as dynamic error correction, calibration,self-calibration and trimming. Circuit design for sensor systems, such as the design ofprecision instrumentation amplifiers. Impedance sensors, and the associated measurement techniquesand electronics, that measure electrical characteristics to derivephysical and biomedical parameters, such as blood viscosity orgrowth of micro-organisms. Complete sensor systems-on-a-chip, such as CMOS optical imagersand microarrays for DNA detection, and the associated circuit andmicro-fabrication techniques. Vibratory gyroscopes and the associated electronics, employingmechanical and electrical signal amplification to enable low-powerangular-rate sensing. Implantable smart sensors for neural interfacing in bio-medicalapplications. Smart combinations of energy harvesters and energy-storagedevices for autonomous wireless sensors. Smart Sensor Systems: Emerging Technologies and Applicationswill greatly benefit final-year undergraduate and postgraduatestudents in the areas of electrical, mechanical and chemicalengineering, and physics. Professional engineers and researchers inthe microelectronics industry, including microsystem developers,will also find this a thorough and useful volume.

Smart Sensors, Actuators, and MEMS II

Smart Sensors, Actuators, and MEMS II
A Book

by Anonim

  • Publisher : Unknown Publisher
  • Release : 2005
  • Pages : 329
  • ISBN : 9876543210XXX
  • Language : En, Es, Fr & De
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Micro and Smart Devices and Systems

Micro and Smart Devices and Systems
A Book

by K. J. Vinoy,G. K. Ananthasuresh,Rudra Pratap,S. B. Krupanidhi

  • Publisher : Springer
  • Release : 2014-05-21
  • Pages : 508
  • ISBN : 8132219139
  • Language : En, Es, Fr & De
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The book presents cutting-edge research in the emerging fields of micro, nano and smart devices and systems from experts working in these fields over the last decade. Most of the contributors have built devices or systems or developed processes or algorithms in these areas. The book is a unique collection of chapters from different areas with a common theme and is immensely useful to academic researchers and practitioners in the industry who work in this field.

MEMS Sensors

MEMS Sensors
Design and Application

by Siva Yellampalli

  • Publisher : BoD – Books on Demand
  • Release : 2018-07-18
  • Pages : 218
  • ISBN : 1789233941
  • Language : En, Es, Fr & De
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MEMS by becoming a part of various applications ranging from smartphones to automobiles has become an integral part of our everyday life. MEMS is building synergy between previously unrelated fields such as biology, microelectronics and communications, to improve the quality of human life. The sensors in MEMS gather information from the surrounding, which is then processed by the electronics for decision-making to control the environment. MEMS offers opportunities to miniaturize devices, integrate them with electronics and realize cost savings through batch fabrication. MEMS technology has enhanced many important applications in domains such as consumer electronics, biotechnology and communication and it holds great promise for continued contributions in the future. This book focuses on understanding the design, development and various applications of MEMS sensors.